EUV lithography reaches volume production
2019ASML / TSMC
TSMC's 7nm+ became the first high-volume node using ASML's extreme-ultraviolet machines — the tool that unlocked everything below 7nm.
The world's largest foundry; ~two-thirds market share, led 2nm (N2) volume production in Q4 2025.
Editorial profile — compiled by us from public sources.
Standings and milestones are always verified by us against primary sources, regardless of who manages the profile.
TSMC's 7nm+ became the first high-volume node using ASML's extreme-ultraviolet machines — the tool that unlocked everything below 7nm.
All three leaders entered 2nm-class volume in 2025 (TSMC N2 in Q4); demand outstrips supply, with long foundry waitlists.